SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training Because these guides are not
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Description
Because these guides are not formal specifications but are suggestions from which a specification can evolve
1 This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility
1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
and behavior identified in this Document
SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training Because these guides are not
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