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S02900 - SEMI S29 - フッ素系温室効果ガス(F-GHG)排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive 1 This Standard encompasses the
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Description
1 This Standard encompasses the test methods for antifouling property and resistance to chemical reagents of the FPD polarizing films and its related materials
The surface treatment chemistries are different for n- and p-type wafers
The EUV Pod has the following components and subcomponents
The required texture usually is not well defined by a single roughness
S02900 - SEMI S29 - フッ素系温室効果ガス(F-GHG)排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive 1 This Standard encompasses theNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental, Health & Safety Global Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to
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