F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdTpc-Lead Finishes SEMI MF1982-0714 (complete rewrite)

SEMI MF1982-0714 (complete rewrite)

本文書は共通に使われるXMLのエレメントの規定の中核に位置付けられるものであり，ある１つのスタンダードに特化したものではなく，数々のスタンダードを横断的に共通に使われるものである。

These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing

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F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdTpc-Lead Finishes SEMI MF1982-0714 (complete rewrite)This guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been