E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded 1 This Standard contains terminology

1  This Standard contains terminology and reference documents used in SEMI E49

or other related manufacturing equipment and supplier-provided support equipment to cover aspects of equipment acquisition

as this information requires user input and is already specified by SEMI E58

The mask size specifies range from 330 × 450 mm to 1220 × 1400 mm

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded 1 This Standard contains terminologyThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any