P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 A prerequisite for quality and

A prerequisite for quality and process control in manufacturing of silicon wafers and solar cells is the traceability and track ability of the individual wafers

This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by defining the items/parameters needed to procure virgin silicon carrier wafers to be used in a 3DS-IC process

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1-0312 - Specification for SECS-II Protocol Substrate Tracking

P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 A prerequisite for quality andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i. e., the manufacturing of very large scale integrated circuits). Also included are