P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive SEMI F41 — Guide for

SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

orgで，そして2009年7月にCD-ROMで入手可能となる。

The purpose of this Document is to provide a permanent withdrawal notice for SEMI F15 indicating that the technical content has been superseded by Appendix 2

orgで入手可能になり。初版は1993年発行。前版は1994年発行。

P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive SEMI F41 — Guide forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.