E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded BWS measurement performance may surpass

BWS measurement performance may surpass what is contained in this Guide

and analytical procedures for the gases listed in the index

and simulating performance in the potential end use environments and manufacturing processes

SEMI E137 — Guide for Final Assembly

E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded BWS measurement performance may surpassThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)