MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 원본은 1992년에 발행되었고

원본은 1992년에 발행되었고

This Practice is intended primarily as a guide in preparing an optical microscope for dimensional measurements and is used in conjunction with the instruction manual provided by the manufacturer

SEMI MF1763-0318 (technical revision)

SEMI E1-0697 (Reapproved 1102)E (editorial revision)

MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 원본은 1992년에 발행되었고1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)