E14200 - SEMI E142 - Specification for Substrate Mapping StdTpc-Silicon on Insulator SEMI E125 — Specification for

SEMI E125 — Specification for Equipment Self Description (EqSD)

This Standard covers a definition and usage of secure

2  This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management

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E14200 - SEMI E142 - Specification for Substrate Mapping StdTpc-Silicon on Insulator SEMI E125 — Specification for1 Purpose 1. 1 This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays. 2 Scope 2. 1 This version of the Specification applies to the substrate types: wafers, frames, strips, and trays. 2. 2 This Specification addresses assembly and packaging including the testing of semiconductor devices. Subordinate Standards (included) SEMI E142. 1 Specification for