P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic SEMI E113-1101 (first published)

SEMI E113-1101 (first published)

but in this case

本試験方法の目的は，MFCに関わる取付姿勢の影響を定量化する標準方法を提供することである。

• To define key specifications for EUV substrates that ensure physical dimensional compatibility with EUV carriers

P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic SEMI E113-1101 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2003428Japanese Regional Standards Committee20036www. semi. org200371992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to