M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220

M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220A number of device manufacturers utilize silicon annealed wafers to gain improved device characteristics. This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits. This Specification covers dimensional, electrical, chemical, and structural properties of silicon annealed wafers for 180 nm, 130 nm, 90 nm, (Table R1 1), 65 nm, 45 nm, 32 nm, (Table R1

Furnace Grade used in the semiconductor industry and testing procedures to support those standards

SEMI E28-0218 (technical revision)

transportation

8-0698 (Reapproved 0615)

The scope is limited to defining the key EQIPs and their linking to process program parameters

The SEMI World Fab Watch report is a powerful and comprehensive database of 1000-plus fabs

SEMI E87 — Specification for Carrier Management (CMS)

within semiconductor device manufacturing facilities

SEMI E122-0703 (Reapproved 1109)

SEMI E32 — Material Movement Management (MMM)

SEMI MF1763-0318 (technical revision)

previously published January 2017