G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 This Standard includes the measuring

This Standard includes the measuring

This Document is intended for point of use (POU) inert gas purifiers where inlet purity is 99

• Process module and substrate process tracking state models for recipe execution

This Standard defines the TS-Clock object for accessing factory application and equipment time value and synchronization status

G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 This Standard includes the measuringAssembly & Packaging Global Technical Committee201364global Audits and Reviews Subcommittee20136www. semiviews. org www. semi. org 450mm450TFC450TFC 450mm450TFC450TFC 450TFC PGVAGVOHT450TFC Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer SEMI G92 Specification for Tape Frame Cassette for 450 mm Wafer