F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27

If present

1 — Specification for Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport

SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive This edition was approved forThis standard was technically approved by the global Facilities Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in February 2009. The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates. The use of adapter plates has been shown to reduce the time and cost