E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded SEMI E109-1017 (technical revision)

SEMI E109-1017 (technical revision)

It is intended that HSMS be supplemented by Subordinate Standards which further specify details of its use or impose restrictions on its use in particular application domains

the suppliers of FPU (e

originally published in 1983

E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded SEMI E109-1017 (technical revision)1 Purpose 1. 1 The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below. 2 Scope 2. 1 The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment,